Atmospheric-pressure hybrid plasma with combination of ac and microwave

Journal Article · Mon Dec 18 00:00:00 EST 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2403930· OSTI ID:20880180

Hong, Yong Cheol; Uhm, Han Sup ^[1]

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1. Department of Molecular Science and Technology, Ajou University, San 5, Wonchon-Dong, Youngtong-Gu, Suwon 443-749 (Korea, Republic of)

A hybrid plasma system with combination of ac and microwave at atmospheric pressure was developed. The hybrid plasma is initiated by ac capillary plasma, is stabilized by a flowing channel of working gas through common electrodes, and is expanded by the dissipation of microwave energy, revealing two distinguishable plasma columns of about 1 m in length and a transition point. The capillary in the hybrid plasma system is working as a common electrode for the microwave and ac plasmas. Optical emission spectroscopy is used to characterize and monitor the argon and nitrogen excited species produced in different plasma columns.

• OSTI ID: 20880180
• Journal Information: Applied Physics Letters, Vol. 89, Issue 25; Other Information: DOI: 10.1063/1.2403930; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ATMOSPHERIC PRESSURE
CAPILLARIES
ELECTRODES
EMISSION SPECTROSCOPY
EXCITED STATES
HIGH-FREQUENCY DISCHARGES
MICROWAVE RADIATION
NITROGEN
PLASMA
PLASMA DIAGNOSTICS
PLASMA INSTABILITY