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Title: Integrated Microcalorimeters Using Ir TES And Sn Mushroom Absorbers

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.2355322· OSTI ID:20877532
; ;  [1]
  1. Department of Physics, University of Miami, 1320 Campo Sano Dr, Coral Gables, FL 33146 (United States)

Cryogenic microcalorimeters have the potential to meet the requirements of future x-ray missions. The University of Miami has recently started a program to fabricate fully integrated microcalorimeter arrays. We deposit high purity iridium thin film as Transition Edge Sensors (TES). We chose iridium because it has a bulk transition temperature of 112 mK and we expect single layer TES to have good reproducibility and long term stability. Also we use integrated tin film in a mushroom geometry as the absorbers to get high filling factor, low heat capacity and easy array manufacturing process. We present here our preliminary results in both areas.

OSTI ID:
20877532
Journal Information:
AIP Conference Proceedings, Vol. 850, Issue 1; Conference: LT24: 24. international conference on low temperature physics, Orlando, FL (United States), 10-17 Aug 2005; Other Information: DOI: 10.1063/1.2355322; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English