Quartz crystal microbalance sample stage for in situ characterization of thickness and surface morphology of spin coated polymer films

Journal Article · Wed Nov 15 00:00:00 EST 2006 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2393167· OSTI ID:20861507

Nanxia, Rao; Xin, Xie; Wielizcka, David; Daming, Zhu ^[1]

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1. Department of Physics, University of Missouri-Kansas City, 5110 Rockhill Road, Kansas City, Missouri 64110 (United States)

A miniature spin coating stage is developed for in situ characterization of the thickness and the surface morphology of spin coated polymer films using quartz crystal microbalance (QCM) and atomic force microscopy. The spin coated polystyrene films deposited on gold surfaces from solutions using the stage were found to be uniform; the thickness of the films varied linearly with the polystyrene concentration in solution. The film thickness determined by the QCM agree with that from ellipsometry measurements.

• OSTI ID: 20861507
• Journal Information: Review of Scientific Instruments, Vol. 77, Issue 11; Other Information: DOI: 10.1063/1.2393167; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
CRYSTALS
ELLIPSOMETRY
FILMS
GOLD
MICROBALANCES
MORPHOLOGY
POLYSTYRENE
QUARTZ
SOLUTIONS
SURFACES
THICKNESS