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Quartz crystal microbalance sample stage for in situ characterization of thickness and surface morphology of spin coated polymer films

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.2393167· OSTI ID:20861507
; ; ;  [1]
  1. Department of Physics, University of Missouri-Kansas City, 5110 Rockhill Road, Kansas City, Missouri 64110 (United States)
A miniature spin coating stage is developed for in situ characterization of the thickness and the surface morphology of spin coated polymer films using quartz crystal microbalance (QCM) and atomic force microscopy. The spin coated polystyrene films deposited on gold surfaces from solutions using the stage were found to be uniform; the thickness of the films varied linearly with the polystyrene concentration in solution. The film thickness determined by the QCM agree with that from ellipsometry measurements.
OSTI ID:
20861507
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 11 Vol. 77; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English

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