Abatement of SF{sub 6} and CF{sub 4} using an enhanced kerosene microwave plasma burner
- Department of Molecular Science and Technology, Ajou University, San 5, Wonchon-Dong, Youngtong-Gu, Suwon 443-749 (Korea, Republic of)
A kerosene microwave plasma burner was presented as a tool for abatement of SF{sub 6} and CF{sub 4} gases, which cause global warming. The plasma burner operates by injecting kerosene as a liquid hydrocarbon fuel into a microwave plasma torch and by mixing the resultant gaseous hydrogen and carbon compounds with air or oxygen (O{sub 2}) gas. The abatement of SF{sub 6} and CF{sub 4}, by making use of the kerosene plasma burner, was conducted in terms of nitrogen (N{sub 2}) flow rates. The destruction and removal efficiency of the burner were achieved up to 99.9999% for 0.1 liters per minute (lpm) SF{sub 6} in 120 lpm N{sub 2} and 99.3% for 0.05 lpm CF{sub 4} in 60 lpm N{sub 2}, revealing that the microwave plasma burner can effectively eliminate perfluorocompounds emitted from the semiconductor industries.
- OSTI ID:
- 20860411
- Journal Information:
- Physics of Plasmas, Vol. 13, Issue 11; Other Information: DOI: 10.1063/1.2397044; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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