Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems
We propose to use a Nomarski imaging interferometer to measure the out-of-plane displacement field of micro-electro-mechanical systems. It is shown that the measured optical phase arises from both height and slope gradients. By using four integrating buckets, a more efficient approach to unwrap the measured phase is presented,thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measured optical phase map change with a mechanical loading. A measurement reproducibility of approximately 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a setup to provide a reliable full-field kinematic measurement without surface modification.
- OSTI ID:
- 20853679
- Journal Information:
- Applied Optics, Vol. 45, Issue 30; Other Information: DOI: 10.1364/AO.45.007800; (c) 2006 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
Similar Records
Measurement of longitudinal displacement using lateral shearing cyclic path optical configuration setup and phase shifting interferometry
Ultrasensitive measurement of microcantilever displacement below the shot-noise limit