Characterization of dynamic microgyroscopes by use of temporal digital image correlation

Journal Article · Fri Oct 20 04:00:00 EDT 2006 · Applied Optics

DOI:https://doi.org/10.1364/AO.45.007785· OSTI ID:20853678

Fujun, Yang; Xiaoyuan, He; Chenggen, Quan

The advanced mechanical testing of microelectromechanical systems (MEMS) is necessary to provide feedback of measurements that can help the designer optimize MEMS structures and improve the reliability and stability of MEMS. We describe a digital image correlation (DIC) method for dynamic characterization of MEMS using an optical microscope with a high-speed complementary metal oxide semiconductor-based camera. The mechanical performance of a series of microgyroscopesis tested. The DIC method is employed to measure the microgyroscope in-plane displacement with subpixel accuracy. Use of the DIC method is less restrictive on the surface quality of the specimen and simplifies the measurement system. On the basis of a series of temporal digital images grabbed by a high-speed camera, the stability characteristic of the microgyroscopes is analyzed. In addition, the quality factors of the microgyroscopes are determined and agree well with other experimental methods.

• OSTI ID: 20853678
• Journal Information: Applied Optics, Journal Name: Applied Optics Journal Issue: 30 Vol. 45; ISSN 0003-6935; ISSN APOPAI
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCURACY
CAMERAS
CORRELATIONS
ELECTROMECHANICS
FEEDBACK
GYROSCOPES
IMAGE PROCESSING
IMAGES
MICROSTRUCTURE
OPTICS
PERFORMANCE
QUALITY FACTOR
RELIABILITY
SEMICONDUCTOR MATERIALS
SIGNALS