Continuous roll-to-roll serpentine deposition for high throughput a-Si PV manufacturing
- Energy Conversion Devices, Inc., Troy, MI (United States)
In order to further improve the economies of scale which are inherent in ECD`s continuous roll-to-roll amorphous silicon alloy solar cell manufacturing process, the authors have developed a concept for a serpentine web plasma CVD deposition process to maximize throughput while keeping the size of the deposition chambers small. When this technique is incorporated into a continuous roll-to-roll PV manufacturing process, it will maximize the throughput for a high volume production plant, reduce the machine cost, improve gas utilization, reduce power consumption, and improve the solar cell stability. To demonstrate the serpentine web deposition concept, the authors have constructed a single loop serpentine deposition chamber to deposit a-Si for n-i-p structure solar cells. During the initial process of optimization, they have produced single-junction a-Si solar cells with 8.6% efficiency, and triple-junction a-Si solar cells with a 9.5% initial efficiency, where the top cell intrinsic layer was deposited in the serpentine deposition chamber.
- OSTI ID:
- 208189
- Report Number(s):
- CONF-941203-; ISBN 0-7803-1459-X; TRN: IM9616%%517
- Resource Relation:
- Conference: 1. world conference on photovoltaic energy conversion, Waikoloa, HI (United States), 5-9 Dec 1994; Other Information: PBD: 1994; Related Information: Is Part Of 1994 IEEE first world conference on photovoltaic energy conversion: Conference record of the twenty fourth IEEE photovoltaic specialists conference -- 1994. Volume 1; PB: 1303 p.
- Country of Publication:
- United States
- Language:
- English
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