RF sputtered CdS/CdTe solar cells: Effects of magnetic field, RF power, target morphology, and substrate temperature

Conference · Sat Dec 31 04:00:00 EST 1994

OSTI ID:208022

Compaan, A D; Shao, M; Tabory, C N; Feng, Z; Fischer, A; Matulionis, I; Bohn, R G ^[1]

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1. Univ. of Toledo, OH (United States). Dept. of Physics and Astronomy

In this paper the authors present a study of the influence of substrate temperature, RF power, target erosion, and magnetic field configuration on RF sputtering of CdTe and CdS. These sputtering parameters are shown to affect deposition rate, film morphology, photoluminescence efficiency, and cell performance. The magnetic field shape and strength affects the charged particle flux on the growing film and appears to have a strong influence on the final cell performance.

• OSTI ID: 208022
• Report Number(s): CONF-941203--; ISBN 0-7803-1459-X
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
CADMIUM SULFIDE SOLAR CELLS
CADMIUM SULFIDES
CADMIUM TELLURIDE SOLAR CELLS
CADMIUM TELLURIDES
FABRICATION
MAGNETIC FIELDS
PARAMETRIC ANALYSIS
PERFORMANCE
QUANTUM EFFICIENCY
SPUTTERING
TEMPERATURE DEPENDENCE