Effect of Coulomb Collisions on Low Gas Pressure Plasmas

Journal Article · Fri May 05 00:00:00 EDT 2006 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2204570· OSTI ID:20798674

Nanbu, K ^[1]; Furubayashi, T ^[2]

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1. Institute of Fluid Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai, 980-8577 (Japan)
2. Graduate School of Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai, 980-8577 (Japan)

A recent trend in material processing plasmas is the use of a low gas pressure and high plasma density. In such plasmas, Coulomb collisions among charged particles has been considered to have a significant effect on plasma structure. By use of Bobylev and Nanbu's theory [Phy. Rev. E, 61(2000), 4576], this effect on argon plasmas and oxygen plasmas generated by a capacitive discharge is examined. It is found that the effect is appreciable only for oxygen plasmas.

• OSTI ID: 20798674
• Journal Information: AIP Conference Proceedings, Vol. 832, Issue 1; Conference: 2. international conference on flow dynamics, Sendai (Japan), 16-18 Nov 2005; Other Information: DOI: 10.1063/1.2204570; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
CHARGED PARTICLES
COLLISIONS
OXYGEN
PLASMA
PLASMA DENSITY
PLASMA PRESSURE
PROCESSING