Improved calculation of the backscattering factor for quantitative analysis by Auger electron spectroscopy

Journal Article · Sat Apr 15 04:00:00 EDT 2006 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2189928· OSTI ID:20788096

Ding, Z J; Tan, W S; Li, Y G ^[1]

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1. Hefei National Laboratory for Physical Sciences at Microscale, University of Science and Technology of China, Hefei, 230026 Anhui (China) and Department of Physics, University of Science and Technology of China, Hefei, 230026 Anhui (China)

Based on a Monte Carlo simulation method, an improved calculation of the backscattering factor in quantitative analysis by Auger electron spectroscopy has been performed by integrating several aspects of recent progresses in the related fields. The calculation used a general definition of backscattering factor, more accurate ionization cross section, up-to-date Monte Carlo model of electron inelastic scattering, and a large number of electron trajectories to ensure less statistical error. The results reveal several noticeable properties of backscattering factor, i.e., its slow variation with primary energy at higher overvoltage ratios, and dependence on the geometrical configuration of a detector. However, only for large emission angles of Auger signals a considerable angular dependence of backscattering factor is found. Specifically a calculation is carried out for detection in the solid angles of a cylindrical mirror analyzer. This backscattering factor can be less than unity for very low primary energies closing to ionization energy and/or for large incident angles. The physical cause has been detailed and analyzed.

• OSTI ID: 20788096
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 99; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AUGER ELECTRON SPECTROSCOPY
BACKSCATTERING
COMPUTERIZED SIMULATION
CROSS SECTIONS
ELECTRONS
INELASTIC SCATTERING
IONIZATION
MONTE CARLO METHOD
OVERVOLTAGE
TRAJECTORIES