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Title: In situ simple method for measuring size and density of nanoparticles in reactive plasmas

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.2189951· OSTI ID:20788085
; ; ; ;  [1]
  1. Department of Electronics, Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 812-8581 (Japan)

A laser-light-scattering (LLS) method for measuring the size and density of nanoparticles generated in reactive plasmas has been developed. The size and density of the nanoparticles are determined from their thermal coagulation that takes place after turning off the discharge. The measurable size and density range of the LLS method is n{sub p} x 10{sup 13} (m{sup -3/2})xd{sub p}{sup -5/2}L{sup -2}n{sub g}{sup -1}, where n{sub p}, d{sub p}, L, and n{sub g} are the density, size, and diffusion length of the nanoparticles, and the density of a background gas, respectively. The method has been demonstrated by measurement of the size and density of nanoparticles formed by the radio-frequency discharge of dimethyldimethoxysilane Si(CH{sub 3}){sub 2}(OCH{sub 3}){sub 2} diluted with Ar. Using a simple optical setup for the LLS measurement, nanoparticles are detected down to {approx_equal}1 nm in size when they are generated at a density of {approx_equal}10{sup 12} cm{sup -3}. The developed method is widely applicable to other systems in which thermal coagulation takes place.

OSTI ID:
20788085
Journal Information:
Journal of Applied Physics, Vol. 99, Issue 8; Other Information: DOI: 10.1063/1.2189951; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English