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Title: Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing

Abstract

The control of plasma characteristics is one of the important issues in many atmospheric pressure plasma applications. In order to accomplish this control, a feasibility study was performed by investigating the role of helium gas in an argon glow plasma that were produced in ambient air by 13.56 MHz radio-frequency power. Optical emission spectroscopy was used to measure rotational temperature and emission spectra acquired between 300 and 840 nm. Based on electrical and optical measurements, parameters such as gas temperature, breakdown voltage, power coupling efficiency, spatial uniformity of rotational temperature, and the sum of the emission intensity were controlled by varying the argon and helium gas mixing ratio. The addition of helium gas (from 0 to 10 lpm) to the argon flow (of 10 lpm) lowered the breakdown voltage (from 430 to 300 V{sub pk}) and the rotational temperature (from 465 to 360 K). However, an excessive addition of helium resulted in a reduction of the spatial uniformity and efficiency of power coupling. When the ratio of helium to argon flow was between 0.3 and 0.5, a high spatial uniformity with a relatively low gas temperature and breakdown voltage was achieved. This suggests that mixing of the supply gas ismore » a useful way of controlling the plasma characteristics that may be utilized for applications with specific required discharge conditions.« less

Authors:
; ;  [1]
  1. Department of Physics, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701 (Korea, Republic of)
Publication Date:
OSTI Identifier:
20782475
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 13; Journal Issue: 1; Other Information: DOI: 10.1063/1.2161173; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; COUPLING; EFFICIENCY; ELECTRIC POTENTIAL; ELECTRON TEMPERATURE; EMISSION SPECTRA; EMISSION SPECTROSCOPY; FEASIBILITY STUDIES; GLOW DISCHARGES; HELIUM; HIGH-FREQUENCY DISCHARGES; ION TEMPERATURE; MHZ RANGE; MIXING RATIO; PLASMA; PLASMA DIAGNOSTICS; RADIOWAVE RADIATION

Citation Formats

Moon, Se Youn, Han, Jewoo, and Choe, W. Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing. United States: N. p., 2006. Web. doi:10.1063/1.2161173.
Moon, Se Youn, Han, Jewoo, & Choe, W. Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing. United States. doi:10.1063/1.2161173.
Moon, Se Youn, Han, Jewoo, and Choe, W. Sun . "Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing". United States. doi:10.1063/1.2161173.
@article{osti_20782475,
title = {Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing},
author = {Moon, Se Youn and Han, Jewoo and Choe, W.},
abstractNote = {The control of plasma characteristics is one of the important issues in many atmospheric pressure plasma applications. In order to accomplish this control, a feasibility study was performed by investigating the role of helium gas in an argon glow plasma that were produced in ambient air by 13.56 MHz radio-frequency power. Optical emission spectroscopy was used to measure rotational temperature and emission spectra acquired between 300 and 840 nm. Based on electrical and optical measurements, parameters such as gas temperature, breakdown voltage, power coupling efficiency, spatial uniformity of rotational temperature, and the sum of the emission intensity were controlled by varying the argon and helium gas mixing ratio. The addition of helium gas (from 0 to 10 lpm) to the argon flow (of 10 lpm) lowered the breakdown voltage (from 430 to 300 V{sub pk}) and the rotational temperature (from 465 to 360 K). However, an excessive addition of helium resulted in a reduction of the spatial uniformity and efficiency of power coupling. When the ratio of helium to argon flow was between 0.3 and 0.5, a high spatial uniformity with a relatively low gas temperature and breakdown voltage was achieved. This suggests that mixing of the supply gas is a useful way of controlling the plasma characteristics that may be utilized for applications with specific required discharge conditions.},
doi = {10.1063/1.2161173},
journal = {Physics of Plasmas},
number = 1,
volume = 13,
place = {United States},
year = {Sun Jan 15 00:00:00 EST 2006},
month = {Sun Jan 15 00:00:00 EST 2006}
}
  • A time modulated radio frequency (RF) plasma jet operated with an Ar mixture is investigated by measuring the electron density and electron temperature using Thomson scattering. The measurements have been performed spatially resolved for two different electrode configurations and as a function of the plasma dissipated power and air concentration admixed to the Ar. Time resolved measurements of electron densities and temperatures during the RF cycle and after plasma power switch-off are presented. Furthermore, the influence of the plasma on the air entrainment into the effluent is studied using Raman scattering.
  • In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), current (I), and power (P), are measured for both helium and argon plasmas, and the electron temperatures and electron densities for them are evaluated by means of the equivalent circuit model and the power balance equation. By comparison of the discharge characteristics of the helium and argon plasmas, it is found that the discrepant macroscopic characteristics of helium and argon plasma,more » viz., current and voltage characteristics and current and power characteristics, are owed to their own intrinsic microscopic parameters of the helium and argon atoms, such as the first excited energy, the ionization energy, the total cross section, and the atom mass. Furthermore, the influences of the additive gas, oxygen gas, on the electrical discharge characteristics are also investigated in the helium and argon plasmas, which are closely related to the electron temperature of plasmas.« less
  • In this letter, atmospheric-pressure glow discharges in {gamma} mode with argon/nitrogen as the plasma-forming gas using water-cooled, bare copper electrodes driven by radio-frequency power supply at 13.56 MHz are achieved. The preliminary studies on the discharge characteristics show that, induced by the {alpha}-{gamma} coexisting mode or {gamma} mode discharge of argon, argon-nitrogen mixture with any mixing ratios, even pure nitrogen, can be employed to generate the stable {gamma} mode radio-frequency, atmospheric-pressure glow discharges and the discharge voltage rises with increasing the fraction of nitrogen in the argon-nitrogen mixture for a constant total gas flow rate.
  • Rf, atmospheric-pressure glow discharge (APGD) plasmas with bare metal electrodes have promising prospects in the fields of plasma-aided etching, thin film deposition, disinfection and sterilization, etc. In this paper, the discharge characteristics are presented for the rf APGD plasmas generated with pure argon or argon-ethanol mixture as the plasma-forming gas and using water-cooled, bare copper electrodes. The experimental results show that the breakdown voltage can be reduced significantly when a small amount of ethanol is added into argon, probably due to the fact that the Penning ionization process is involved, and a pure {alpha}-mode discharge can be produced more easilymore » with the help of ethanol. The uniformity of the rf APGDs of pure argon or argon-ethanol mixtures using bare metallic electrodes is identified with the aid of the intensified charge coupled device images.« less
  • The two-dimensional profiles of the electron density, electron temperature, neutral translational temperature, and molecular rotational temperature are investigated in an argon atmospheric pressure plasma jet, which is driven by the radio frequency of 13.56 MHz by means of the laser scattering methods of Thomson, Rayleigh, and Raman. All measured parameters have maximum values at the center of the discharge and decrease toward the plasma edge. The results for the electron temperature profile are contrary to the results for the microwave-driven plasma. From our experimental results, the profiles of the plasma parameters arise from the radial contraction of plasmas and themore » time averaged profile of the electric field, which is obtained by a microwave simulation performed under identical conditions to the plasma jet. In the case of the neutral temperature, a higher translational temperature than the rotational temperature is measured, and its discrepancy is tentatively explained in terms of the low ion-neutral charge exchange rate and the additional degrees of freedom of the molecules. The description of our experimental results and the underlying physics are addressed in detail.« less