Probabilistic analysis of tetrahedral carbon hybridization in amorphous carbon films
- Department of Mechanical Engineering, University of California, Berkeley, California 94720 (United States)
An energetic particle collision analysis of the effect of Ar{sup +} ion bombardment on tetrahedral carbon hybridization (sp{sup 3}) in amorphous carbon (a-C) thin films is presented for nonmagnetron radio-frequency sputtering. The analysis is based on sequential surface events involving the collision of Ar{sup +} ions with carbon atoms on the surface of the growing film and subsequent collision cascades between excited carbon atoms and other surface carbon atoms, which promote the formation of sp{sup 3} carbon bonding. The model is validated by transmission electron and electron energy loss spectroscopy results that confirm the existence of a two-layer film structure consisting of an ultrathin interface layer and a continuous a-C film. Analytical results for the sp{sup 3} carbon content are shown to be in good agreement with similar experimental results obtained from the analysis of the C1s core level spectra of the sputtered a-C films.
- OSTI ID:
- 20779351
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 22 Vol. 88; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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