Fabrication and characterizations of proton-exchanged LiNbO{sub 3} waveguides fabricated by inductively coupled plasma technique
- Department of Electrical and Electronic Engineering, University of Bristol, Bristol BS8 1UB (United Kingdom)
This Letter reports the use of an inductively coupled plasma technique for fabrication of proton-exchanged (PE) LiNbO{sub 3} (LN) waveguides. Planar and stripe waveguides have been formed in Y-cut LN which are difficult to obtain with the conventional molten acid method due to the occurrence of surface damage. Secondary ion mass spectrometry, scanning electron microscopy, and infrared absorption spectrum characterization results revealed that a uniform vertical PE profile with a single low order crystal phase has been directly obtained as a result of this unique process. X-ray photoelectron spectroscopy characterization of the treated surface revealed the existence of NbO as the cause for a sometimes darkened surface and confirms the ability to completely restore the surface to LN by oxygen plasma treatment. Atomic force microscopy measurement confirms that good surface quality has been maintained after regeneration of the surface to LN.
- OSTI ID:
- 20779166
- Journal Information:
- Applied Physics Letters, Vol. 88, Issue 14; Other Information: DOI: 10.1063/1.2191704; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
GENERAL PHYSICS
ABSORPTION SPECTRA
ATOMIC FORCE MICROSCOPY
CRYSTALS
FABRICATION
INFRARED SPECTRA
ION EXCHANGE
ION MICROPROBE ANALYSIS
LITHIUM COMPOUNDS
MASS SPECTRA
MASS SPECTROSCOPY
NIOBATES
PLASMA
PROTONS
REGENERATION
SCANNING ELECTRON MICROSCOPY
WAVEGUIDES
X-RAY PHOTOELECTRON SPECTROSCOPY