Pre- and postextraction analyses of different charge state ion components produced in a laser ion source

Journal Article · Wed Mar 15 04:00:00 EST 2006 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2170029· OSTI ID:20779053

Belloni, F; Doria, D; Lorusso, A; Nassisi, V; Krasa, J ^[1]

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1. Department of Physics, Applied Electronics Laboratory, University of Lecce (Italy) and I.N.F.N.-Lecce, Via Provinciale Lecce-Arnesano, C.P. 193, 73100 Lecce (Italy)

Knowledge of the relative abundance and the energy distributions of various ion species produced in laser ablation plasma is essential both in the fundamental physics ground, to understand the thermalization and expansion dynamics of the plasma plume, and in the applied physics ground, to obtain an efficient and versatile ion source. We present measurements and analyses related to such aspects, both for plasma in free expansion and for the extracted ion bunch. In particular, we characterized the former by means of ion current measurements, employing appropriate Faraday cups and electrostatic spectrometers. With regard to the latter, we performed time-of-flight spectrometry and depth profiling of implanted substrates. The extracted bunch signal showed modulation on time of flight due to the presence of multiply charged ions; depth profiling by x-ray photoelectron spectroscopy also showed a maximum penetration range and a profile modulation compatible with a multienergetic beam. In these experiments we used ultraviolet excimer lasers, at irradiance values in the range of 0.1-10 GW/cm{sup 2}, to generate plasma from Cu and Al targets. The ion beams were extracted at voltages of tens of kV, dc.

• OSTI ID: 20779053
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 77; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CHARGE STATES
ELECTROSTATIC SPECTROMETERS
ENERGY SPECTRA
EXCIMER LASERS
FARADAY CUPS
ION BEAMS
ION SOURCES
IONS
PLASMA
PLASMA PRODUCTION
TIME-OF-FLIGHT METHOD
X-RAY PHOTOELECTRON SPECTROSCOPY