Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source

Journal Article · Thu Dec 15 00:00:00 EST 2005 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2136874· OSTI ID:20778495

Higashiguchi, Takeshi; Rajyaguru, Chirag; Dojyo, Naoto; Taniguchi, Yosuke; Sakita, Koji; Kubodera, Shoichi; Sasaki, Wataru ^[1]

---

1. Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192 (Japan)

We measured debris characteristics of a tin (Sn) plasma produced by a 10-ns infrared Nd:YAG laser. A maximum kinetic energy of 7 keV of tin ions was observed. Such suprathermal tin ions emitted from a solid planar target consisted of singly and doubly ionized tin ions. Both suprathermal ions and neutral fragments emitted from a target showed the angular distributions of cos{sup 4} {theta} which were narrower than the 13.5-nm extreme ultraviolet (EUV) emission distribution of cos{sup 0.5} {theta}. These measurements would give important information on debris mitigation for efficient EUV sources in the next generation lithography.

• OSTI ID: 20778495
• Journal Information: Review of Scientific Instruments, Vol. 76, Issue 12; Other Information: DOI: 10.1063/1.2136874; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ANGULAR DISTRIBUTION
EMISSION
EXTREME ULTRAVIOLET RADIATION
KEV RANGE 01-10
KINETIC ENERGY
LASER-PRODUCED PLASMA
LASERS
PLASMA PRODUCTION
TIN
TIN IONS