Microfabricated Quadrupole Ion Trap for Mass Spectrometer Applications
Journal Article
·
· Physical Review Letters
- University of Arizona, Tucson, Arizona 85721 (United States)
- Lucent Technologies, Bell Laboratories, Murray Hill, New Jersey 07974 (United States)
- Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
- University of North Carolina, Chapel Hill, North Carolina 27599 (United States)
An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 {mu}m, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10{sup -4} Torr. The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.
- OSTI ID:
- 20777112
- Journal Information:
- Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 12 Vol. 96; ISSN 0031-9007; ISSN PRLTAO
- Country of Publication:
- United States
- Language:
- English
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