Plasma-Surface Reactions at a Spinning Wall
- Department of Chemical Engineering University of Houston, Houston, Texas 77204 (United States)
We report a new method for studying surface reactions and kinetics at moderately high pressures (<10 Torr) in near real time. A cylindrical substrate in a reactor wall is rotated at up to 200,000 rpm, allowing the surface to be periodically exposed to a reactive environment and then analyzed by a triple-differentially pumped mass spectrometer in as little as 150 {mu}s thereafter. We used this method to study oxygen plasma reactions on anodized aluminum. When the substrate is spun with the plasma on, a large increase in O{sub 2} signal at m/e=32 is observed with increasing rotation frequency, due to O atoms that impinge and stick on the surface when it is in the plasma, and then recombine over the {approx}0.7 to 40 ms period probed by changing the rotation frequency. Simulations of O{sub 2} signal versus rotation frequency indicate a wide range of recombination rate constants, ascribed to a range of O-binding energies.
- OSTI ID:
- 20775026
- Journal Information:
- Physical Review Letters, Vol. 96, Issue 1; Other Information: DOI: 10.1103/PhysRevLett.96.018306; (c) 2006 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0031-9007
- Country of Publication:
- United States
- Language:
- English
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