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Title: Plasma-Surface Reactions at a Spinning Wall

Abstract

We report a new method for studying surface reactions and kinetics at moderately high pressures (<10 Torr) in near real time. A cylindrical substrate in a reactor wall is rotated at up to 200,000 rpm, allowing the surface to be periodically exposed to a reactive environment and then analyzed by a triple-differentially pumped mass spectrometer in as little as 150 {mu}s thereafter. We used this method to study oxygen plasma reactions on anodized aluminum. When the substrate is spun with the plasma on, a large increase in O{sub 2} signal at m/e=32 is observed with increasing rotation frequency, due to O atoms that impinge and stick on the surface when it is in the plasma, and then recombine over the {approx}0.7 to 40 ms period probed by changing the rotation frequency. Simulations of O{sub 2} signal versus rotation frequency indicate a wide range of recombination rate constants, ascribed to a range of O-binding energies.

Authors:
; ;  [1]
  1. Department of Chemical Engineering University of Houston, Houston, Texas 77204 (United States)
Publication Date:
OSTI Identifier:
20775026
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physical Review Letters; Journal Volume: 96; Journal Issue: 1; Other Information: DOI: 10.1103/PhysRevLett.96.018306; (c) 2006 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ALUMINIUM; BINDING ENERGY; CHEMICAL ANALYSIS; MASS SPECTROMETERS; OXYGEN; PERIODICITY; PLASMA; PLASMA DIAGNOSTICS; PLASMA SIMULATION; PRESSURE RANGE KILO PA; REACTION KINETICS; RECOMBINATION; ROTATION; SIGNALS; SUBSTRATES; SURFACES; WALL EFFECTS

Citation Formats

Kurunczi, P.F., Guha, J., and Donnelly, V.M.. Plasma-Surface Reactions at a Spinning Wall. United States: N. p., 2006. Web. doi:10.1103/PhysRevLett.96.018306.
Kurunczi, P.F., Guha, J., & Donnelly, V.M.. Plasma-Surface Reactions at a Spinning Wall. United States. doi:10.1103/PhysRevLett.96.018306.
Kurunczi, P.F., Guha, J., and Donnelly, V.M.. Fri . "Plasma-Surface Reactions at a Spinning Wall". United States. doi:10.1103/PhysRevLett.96.018306.
@article{osti_20775026,
title = {Plasma-Surface Reactions at a Spinning Wall},
author = {Kurunczi, P.F. and Guha, J. and Donnelly, V.M.},
abstractNote = {We report a new method for studying surface reactions and kinetics at moderately high pressures (<10 Torr) in near real time. A cylindrical substrate in a reactor wall is rotated at up to 200,000 rpm, allowing the surface to be periodically exposed to a reactive environment and then analyzed by a triple-differentially pumped mass spectrometer in as little as 150 {mu}s thereafter. We used this method to study oxygen plasma reactions on anodized aluminum. When the substrate is spun with the plasma on, a large increase in O{sub 2} signal at m/e=32 is observed with increasing rotation frequency, due to O atoms that impinge and stick on the surface when it is in the plasma, and then recombine over the {approx}0.7 to 40 ms period probed by changing the rotation frequency. Simulations of O{sub 2} signal versus rotation frequency indicate a wide range of recombination rate constants, ascribed to a range of O-binding energies.},
doi = {10.1103/PhysRevLett.96.018306},
journal = {Physical Review Letters},
number = 1,
volume = 96,
place = {United States},
year = {Fri Jan 13 00:00:00 EST 2006},
month = {Fri Jan 13 00:00:00 EST 2006}
}