Modeling of breakdown behavior in radio-frequency argon discharges with improved secondary emission model

Journal Article · Wed Jun 15 04:00:00 EDT 2005 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.1922267· OSTI ID:20764345

Radmilovic-Radjenovic, M; Lee, J K ^[1]

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1. Electronics and Electrical Engineering Department, Pohang University of Science and Technology, Pohang 790-784 (Korea, Republic of)

This work represents the investigation of the dependence of the breakdown voltage on the gas pressure and on the frequency in radio-frequency argon discharges. Calculations were performed by using a one-dimensional particle-in-cell/Monte Carlo code with three velocity components with a new secondary emission model. The obtained results show that the multivalued nature of the left-hand branch of the breakdown curve can be achieved only by taking into account energy dependence of the yield per ion. The multivalued nature of the left-hand branch of the breakdown curve is attributed to the influence of the secondary emission characteristics of the electrodes on the breakdown voltage. Simulation results show a good agreement with the available experimental data. Disagreements between simulation results and theoretical predictions based on the phenomenological method indicate that a more accurate determination of molecular constants is needed. As a result of the satisfactory agreement between simulation and experimental data for dependence of the breakdown voltage on the frequency, a frequency scaling law is proposed.

• OSTI ID: 20764345
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 6 Vol. 12; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
BREAKDOWN
HIGH-FREQUENCY DISCHARGES
MONTE CARLO METHOD
ONE-DIMENSIONAL CALCULATIONS
PLASMA PRESSURE
PLASMA SIMULATION
SECONDARY EMISSION