Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy

Journal Article · Thu Jul 15 00:00:00 EDT 2004 · Materials Characterization

DOI:https://doi.org/10.1016/j.matchar.2004.06.006· OSTI ID:20748637

Xu, C H ^[1]; Woo, C H ^[1]; Shi, S Q ^[2]; Wang, Y ^[3]

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1. Department of Electronic and Information Engineering, Hong Kong Polytechnic University, Hunghom, Kowloon, Hong Kong (China)
2. Department of Mechanical Engineering, Hong Kong Polytechnic University, Hunghom, Kowloon, Hong Kong (China)
3. Department of Applied Physics, Hong Kong Polytechnic University, Hunghom, Kowloon, Hong Kong (China)

Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO{sub 2}/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.

• OSTI ID: 20748637
• Journal Information: Materials Characterization, Journal Name: Materials Characterization Journal Issue: 4-5 Vol. 52; ISSN 1044-5803; ISSN MACHEX
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
ELECTRIC POTENTIAL
ELECTRODES
IMAGES
KHZ RANGE
MODULATION
NOISE
PIEZOELECTRICITY
PZT
SIGNALS
SILICON OXIDES
SOL-GEL PROCESS
THIN FILMS
TOPOGRAPHY