Void formation and dust cloud structure in (a)symmetric RF discharges
Journal Article
·
· AIP Conference Proceedings
- FOM Institute for Plasma Physics Rijnhuizen, Association EURATOM-FOM, Trilateral Euregio Cluster, P.O. Box 1207, 3430 BE Nieuwegein (Netherlands)
The behaviour of dust particles in a discharge is the result of the concerted action of the charging process and forces like gravity, the ion and neutral drag force, and the thermophoretic force. Since the ion drag force plays a major role, the reactor geometry and the ion density profile are important parameters. In this paper we study the influence of the geometrical features of a radio-frequency discharge, such as asymmetry, ring electrodes, and a depression in the electrodes.
- OSTI ID:
- 20726790
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 799; ISSN APCPCS; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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