Development of a 27.12 MHz radio frequency driven ion source with 3 mTorr operation pressure for neutron generators
Journal Article
·
· Review of Scientific Instruments
- Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)
An inductively coupled rf plasma ion source has been developed for neutron generators. The ion source configuration has been optimized for low pressure operation. Both 13.56 and 27.12 MHz rf powers have been used to generate hydrogen plasma. Experimental results show that 27.12 MHz operation is more efficient than 13.56 MHz in a low pressure region. The ion source can also be operated in pulsed mode. Current density higher than 30 mA/cm{sup 2} can be extracted from a 2-mm-diam aperture at 2 kW rf input power and 3 mTorr operation pressure.
- OSTI ID:
- 20723175
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 10 Vol. 76; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
Similar Records
Plasma ignition schemes for the SNS radio-frequency driven H- source
Effect of dual frequency on the plasma characteristics in an internal linear inductively coupled plasma source
Coupling effects in inductive discharges with radio frequency substrate biasing
Conference
·
Thu Sep 06 00:00:00 EDT 2001
·
OSTI ID:788039
Effect of dual frequency on the plasma characteristics in an internal linear inductively coupled plasma source
Journal Article
·
Sun Dec 17 23:00:00 EST 2006
· Applied Physics Letters
·
OSTI ID:20880179
Coupling effects in inductive discharges with radio frequency substrate biasing
Journal Article
·
Sun Jan 08 23:00:00 EST 2012
· Applied Physics Letters
·
OSTI ID:22025407