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Efficient sub 100 nm focusing of hard x rays

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.1928191· OSTI ID:20722907
; ; ; ;  [1]
  1. European Synchrotron Radiation Facility (ESRF), BP220 38240, Grenoble (France)

An x-ray beam with energy of 20.5 keV has been efficiently focused down to a spot size as small as 90 nmx90 nm by a Kirkpatrick-Baez reflecting mirrors device. The first mirror, coated with a graded multilayer, plays both the role of vertical focusing device and monochromator, resulting in a very high flux (2x10{sup 11} photons/s) and medium monochromaticity ({delta}E/E{approx}10{sup -2}). Evaluation of the error contributions shows that the vertical focus is presently limited by the mirror figure errors, while the horizontal focus is limited by the horizontal extension of the x-ray source. With a gain in excess of a few million, this device opens up new possibilities in trace element nanoanalysis and fast projection microscopy.

OSTI ID:
20722907
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 6 Vol. 76; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English

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