Plasma sputtering system for deposition of thin film combinatorial libraries
Journal Article
·
· Review of Scientific Instruments
- Department of Chemical and Biomolecular Engineering and Center for Molecularly Engineered Materials, University of Notre Dame, Notre Dame, Indiana 46556 (United States)
The design of a plasma sputtering system for the deposition of combinatorial libraries is described. A rotating carousel is used to position shadow masks between the targets and the substrate. Multilayer films are built up by depositing sequentially through various masks. Postdeposition annealing is used to promote interdiffusion of the layered structures. Either discrete or compositional gradient libraries can be deposited in this system. Samples appropriate for characterization with a scanning electrochemical microscope or a multichannel microelectrode array system can be produced. The properties of some deposited Pt-Ru films for fuel cell applications are described.
- OSTI ID:
- 20722882
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 6 Vol. 76; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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