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Crossover in growth exponent upon nanocrystallization of amorphous thin films

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.2058169· OSTI ID:20714109
 [1]
  1. Laboratory for Neutron Scattering, ETH Zuerich (Switzerland)
Thin films of Fe{sub 75}Zr{sub 25} alloy were deposited by cosputtering of Fe and Zr targets using magnetron sputtering technique in the thickness range of 7-85 nm. It was found that at a critical thickness of about 40 nm, nanocrystallization of initially deposited amorphous phase takes place. A crossover occurs in the growth exponent ({beta}) upon nanocrystallization giving a direct evidence for different growth behavior for amorphous and nanocrystalline phases.
OSTI ID:
20714109
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 6 Vol. 98; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English

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