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Epitaxial growth on silicon and characterization of MnF{sub 2} and ZnF{sub 2} layers with metastable orthorhombic structure

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.1944909· OSTI ID:20713952
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  1. Ioffe Physico-Technical Institute Russian Academy of Sciences, St. Petersburg 194021 (Russian Federation)
The growth of MnF{sub 2} and ZnF{sub 2} layers on Si(001) and Si(111) substrates was studied by molecular-beam epitaxy. Calcium fluoride buffer layers with (001) (110), and (111) orientations were used to prevent chemical interaction of MnF{sub 2} and ZnF{sub 2} molecules with the Si substrate. The analysis of x-ray and reflection high-energy electron-diffraction (RHEED) patterns showed that MnF{sub 2} layers grow on all of these planes in the orthorhombic {alpha}-PbO{sub 2}-type crystal phase observed earlier only at high pressures and temperatures. Atomic force microscopy revealed a strong dependence of the surface morphology on the buffer orientation and growth temperature. The best-ordered MnF{sub 2} growth occurred at 500 deg. C on a CaF{sub 2} (110) buffer layer. The diffraction analysis enabled us to find the epitaxial relations at the MnF{sub 2}/CaF{sub 2} interface. A careful analysis of the RHEED patterns of the films grown on CaF{sub 2}(001) showed a similarity in the structure and growth modes between MnF{sub 2} and ZnF{sub 2} layers, with ZnF{sub 2} tending to form multiphase layers. These findings are in agreement with the x-ray diffraction measurements.
OSTI ID:
20713952
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 98; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English