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Particle-in-cell Monte Carlo modeling of Langmuir probes in an Ar plasma

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.1938275· OSTI ID:20711748
; ; ; ;  [1]
  1. Szewalski Institute of Fluid-Flow Machinery, Polish Academy of Sciences, 80-952 Gdansk, Fiszera 14 (Poland)
The Langmuir-probe diagnostic of a plasma is studied using a particle-in-cell Monte Carlo model. The electron-density, temperature, and potential profiles are determined for a probe immersed in an Ar plasma. The model is verified using the low-pressure results of Sternovsky et al. [J. Appl. Phys. 94, 1374 (2003)]. It was proved that the ion to electron temperature ratio may not be constant in the sheath-presheath region.
OSTI ID:
20711748
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 97; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English

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