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Title: Deep-level emissions influenced by O and Zn implantations in ZnO

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.2135880· OSTI ID:20706430
; ; ; ; ;  [1]
  1. Physical Electronics and Photonics, Department of Physics, Goeteborg University, SE-412 96 Goeteborg (Sweden)

A set of bulk ZnO samples implanted with O and Zn at various densities were investigated by photoluminescence. The implantation concentration of O and Zn is varied between 1x10{sup 17}/cm{sup 3} and 5x10{sup 19}/cm{sup 3}. The samples were thermally treated in an oxygen gas environment after the implantation. The results clearly show the influence of O and Zn implantations on the deep-level emission. By comparing the photoluminescence spectra for the samples with different implantations, we can conclude that the V{sub Zn} is responsible to the observed deep-level emission. In addition, a novel transition at the emission energy of 3.08 eV at 77 K appears in the O-implanted sample with 5x10{sup 19}/cm{sup 3} implantation concentration. The novel emission is tentatively identified as O-antisite O{sub Zn}.

OSTI ID:
20706430
Journal Information:
Applied Physics Letters, Vol. 87, Issue 21; Other Information: DOI: 10.1063/1.2135880; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

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