Influence of the excited states on the electron-energy distribution function in low-pressure microwave argon plasmas
- Instituto de Ciencias de Materiales de Sevilla and Departamento de Fisica Atomica, Molecular y Nuclear and Quimica Inorganica (CSIC, Universidad de Sevilla), Sevilla (Spain)
In this work the influence of the excited states on the electron-energy distribution function has been determined for an argon microwave discharge at low pressure. A collisional-radiative model of argon has been developed taking into account the most recent experimental and theoretical values of argon-electron-impact excitation cross sections. The model has been solved along with the electron Boltzmann equation in order to study the influence of the inelastic collisions from the argon excited states on the electron-energy distribution function. Results show that under certain conditions the excited states can play an important role in determining the shape of the distribution function and the mean kinetic energy of the electrons, deplecting the high-energy tail due to inelastic processes from the excited states, especially from the 4s excited configuration. It has been found that from the populations of the excited states an excitation temperature can be defined. This excitation temperature, which can be experimentally determined by optical emission spectroscopy, is lower than the electron kinetic temperature obtained from the electron-energy distribution function.
- OSTI ID:
- 20706302
- Journal Information:
- Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics, Vol. 72, Issue 1; Other Information: DOI: 10.1103/PhysRevE.72.016401; (c) 2005 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-651X
- Country of Publication:
- United States
- Language:
- English
Similar Records
Theoretical Study of Plasma Parameters Dependence on Gas Temperature in an Atmospheric Pressure Argon Microwave Discharge
Electron-collisional excited-state kinetics in argon and mercury electrical discharges