Free-standing epitaxial La{sub 1-x}(Sr,Ca){sub x}MnO{sub 3} membrane on Si for uncooled infrared microbolometer

Journal Article · Mon Jul 18 04:00:00 EDT 2005 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.1996845· OSTI ID:20702589

Kim, J -H; Grishin, A M ^[1]

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1. Condensed Matter Physics, Royal Institute of Technology, SE-164 40 Stockholm-Kista (Sweden)

Ar ion beam etching and inductively coupled SF{sub 6} and C{sub 4}F{sub 8} plasma-etching processes have been employed to fabricate free standing membrane from the heteroepitaxial La{sub 1-x}(Sr,Ca){sub x}MnO{sub 3}(50 nm)/Bi{sub 4}Ti{sub 3}O{sub 12}(100 nm)/CeO{sub 2}(40 nm)/YSZ(30 nm) film structure pulsed laser deposited on Si(001) wafer. We demonstrate feasibility to use epitaxial colossal magnetoresistive manganite film as thermally isolated self-supporting membrane for uncooled infrared microbolometer applications.

• OSTI ID: 20702589
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 3 Vol. 87; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ARGON IONS
BISMUTH COMPOUNDS
BOLOMETERS
CALCIUM COMPOUNDS
CARBON FLUORIDES
CERIUM OXIDES
ENERGY BEAM DEPOSITION
EPITAXY
ETCHING
LANTHANUM COMPOUNDS
LASER RADIATION
LAYERS
MAGNETORESISTANCE
MANGANESE OXIDES
MEMBRANES
STRONTIUM COMPOUNDS
SULFUR FLUORIDES
TITANATES
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS