Comparative study on emission characteristics of extreme ultraviolet radiation from CO{sub 2} and Nd:YAG laser-produced tin plasmas
- Department of Electrical and Electronic Systems Engineering, Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1 Hakozaki, Fukuoka 812-8581 (Japan)
The direct comparison of the emission characteristics of an extreme ultraviolet (EUV) light between the CO{sub 2} and the Nd:YAG laser-produced plasmas (LPP) with a solid tin target is reported. In the case of the Nd:YAG LPP, the conversion efficiency (C.E.) peaked at a laser intensity of about 5x10{sup 10} W/cm{sup 2} and decreased at higher laser intensity. In the case of the CO{sub 2} LPP, the C.E. monotonically increased up to 2x10{sup 10} W/cm{sup 2}, where the C.E. is comparable to the maximum C.E. of the Nd:YAG LPP. The spectral efficiency of the Nd:YAG LPP within the 2% bandwidth around 13.5 nm decreased with laser intensity. The corresponding spectral efficiency of the CO{sub 2} LPP was almost constant. This observation indicates the potential of the CO{sub 2} laser-produced LPP as the EUV light source for the EUV lithographic systems.
- OSTI ID:
- 20702507
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 4 Vol. 87; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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