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Title: Fabrication of High Performance X-Ray Energy Analyzers

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.1757933· OSTI ID:20653091
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  1. National Synchrotron Radiation Research Center, 101 Hsin-Ann Road, Science-Based Industrial Park, Hsinchu 30077, Taiwan (China)

Crystal analyzers produced by spherically bending a Si crystal wafer are employed in high-resolution inelastic x-ray scattering experiments to increase the counting efficiency. The fabrication commonly involves dicing the crystal wafer into blocks of {approx}1mmx1mm to release the bending strain before gluing the wafer onto a spherical substrate. During the gluing, the relative alignment of each block must be maintained to achieve the desired focusing effect. A novel pressing tool has been designed to apply uniform pressure on the wafer during the gluing process to ensure the relative alignment between the crystal blocks, and has produced analyzers with satisfactory performance. The design details and the fabrication process will be presented and discussed.

OSTI ID:
20653091
Journal Information:
AIP Conference Proceedings, Vol. 705, Issue 1; Conference: 8. international conference on synchrotron radiation instrumentation, San Francisco, CA (United States), 25-29 Aug 2003; Other Information: DOI: 10.1063/1.1757933; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English