Refractive lenses fabricated by deep SR lithography and LIGA technology for X-ray energies from 1 keV to 1 MeV
- Institut fuer Mikrostrukturtechnik/Forschungszentrum Karlsruhe GmbH, 76021 Karlsruhe (Germany)
- ESRF, BP-220, Grenoble Cedex (France)
- Institut fuer Synchrotron Strahlung/Forschungszentrum Karlsruhe GmbH, 76021 Karlsruhe (Germany)
- IMT RAS, Chernogolovka, 142432 (Russian Federation)
SU-8 polymer and Nickel were used to manufacture planar high aspect ratio X-ray refractive lenses by the LIGA process (Deep X-ray lithography, electroforming). The exposure of PMMA and highly sensitive SU-8 resist layers were carried out at the ANKA storage ring, Karlsruhe. Lenses of either round, segment or quasi-parabolic (kinoform) profiles have been designed, fabricated and tested at the ESRF and at the ANKA synchrotron sources with X-ray energies ranging from 12 to 55 keV. The SU-8 polymer lenses tested at ESRF showed an uniform focal line spot with FWHM of appr. 0.32 {mu}m and gains in the range of 320. The characteristics did not alter after an absorbed dose of 2 MJ/cm3. Lenses fabricated from electroplated Ni, 320 {mu}m thick, were tested at a photon energy of 212 keV. In this case the uniform focal line spot was about 5 {mu}m.
- OSTI ID:
- 20653060
- Journal Information:
- AIP Conference Proceedings, Vol. 705, Issue 1; Conference: 8. international conference on synchrotron radiation instrumentation, San Francisco, CA (United States), 25-29 Aug 2003; Other Information: DOI: 10.1063/1.1757905; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fabrication of Compound Refractive X-ray Lenses Using LIGA Process and Performance Tests
Focusing Kinoform Lenses: Optical Design and Experimental Validation