A Novel High-Resolution Mapping Method of d-Spacing And Lattice Plane Orientation

Journal Article · Wed May 12 00:00:00 EDT 2004 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.1757992· OSTI ID:20652817

Xiaowei, Zhang; Okada, Yasumasa; Sugiyama, Hiroshi; Ando, Masami ^[1]

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1. Photon Factory, High Energy Accelerator Research Organization (KEK), Tsukuba, Ibaraki 305-0801 (Japan)

We have developed a fast and stable measuring system of lattice spacing with precision of 10-8 for a silicon crystal at the Photon Factory. Using a combination of this system with an autocollimator, we can not only measure d-spacing, but also can determine lattice plane orientation with sub-arcsec resolution in the same measurement process. We report a mapping measurement of a Boron-doped CZ silicon wafer with 1mm2 spatial resolution.

• OSTI ID: 20652817
• Journal Information: AIP Conference Proceedings, Vol. 705, Issue 1; Conference: 8. international conference on synchrotron radiation instrumentation, San Francisco, CA (United States), 25-29 Aug 2003; Other Information: DOI: 10.1063/1.1757992; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BORON
CRYSTAL STRUCTURE
CRYSTALS
DOPED MATERIALS
LATTICE PARAMETERS
MAPPING
ORIENTATION
SILICON
SPATIAL RESOLUTION
SYNCHROTRON RADIATION
X-RAY DIFFRACTION