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Title: Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source

Abstract

A grazing incidence reflectometer operating in the extreme ultraviolet (EUV) spectral range around 13.5 nm is presented which is making use of a compact xenon pinch plasma light source. The apparatus allows for measuring the absolute reflectivity of a sample for grazing incidence angle in the range from typically 5 deg. to 35 deg. by comparing the EUV diode signal for the reflected light and a reference diode with an accuracy of better than 2%. Design criteria for proper matching of diode apertures and distances with respect to the spatially extended plasma source are presented. The absolute accuracy has been checked by investigating a ruthenium sample with low roughness, which has a reflectivity in the EUV close to the theoretical limit. Comparison to measurements at the EUV-reflectometer of the Physikalisch Technische Bundesanstalt in Berlin at a synchrotron source confirm the absolute accuracy of better than 2% for the reflectivity for the angle interval of interest.

Authors:
; ;  [1];  [2]
  1. Fraunhofer Institute for Laser Technology, Steinbachstrasse 15, D-52074 Aachen (Germany)
  2. (Germany)
Publication Date:
OSTI Identifier:
20646463
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 76; Journal Issue: 4; Other Information: DOI: 10.1063/1.1884387; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ACCURACY; APERTURES; EXTREME ULTRAVIOLET RADIATION; GRAZING; INCIDENCE ANGLE; LIGHT BULBS; LIGHT SOURCES; OPTICS; PLASMA; REFLECTIVITY; ROUGHNESS; RUTHENIUM; SYNCHROTRON RADIATION SOURCES; XENON

Citation Formats

Bergmann, Klaus, Rosier, Oliver, Metzmacher, Christof, and Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen. Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source. United States: N. p., 2005. Web. doi:10.1063/1.1884387.
Bergmann, Klaus, Rosier, Oliver, Metzmacher, Christof, & Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen. Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source. United States. doi:10.1063/1.1884387.
Bergmann, Klaus, Rosier, Oliver, Metzmacher, Christof, and Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen. Fri . "Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source". United States. doi:10.1063/1.1884387.
@article{osti_20646463,
title = {Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source},
author = {Bergmann, Klaus and Rosier, Oliver and Metzmacher, Christof and Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen},
abstractNote = {A grazing incidence reflectometer operating in the extreme ultraviolet (EUV) spectral range around 13.5 nm is presented which is making use of a compact xenon pinch plasma light source. The apparatus allows for measuring the absolute reflectivity of a sample for grazing incidence angle in the range from typically 5 deg. to 35 deg. by comparing the EUV diode signal for the reflected light and a reference diode with an accuracy of better than 2%. Design criteria for proper matching of diode apertures and distances with respect to the spatially extended plasma source are presented. The absolute accuracy has been checked by investigating a ruthenium sample with low roughness, which has a reflectivity in the EUV close to the theoretical limit. Comparison to measurements at the EUV-reflectometer of the Physikalisch Technische Bundesanstalt in Berlin at a synchrotron source confirm the absolute accuracy of better than 2% for the reflectivity for the angle interval of interest.},
doi = {10.1063/1.1884387},
journal = {Review of Scientific Instruments},
number = 4,
volume = 76,
place = {United States},
year = {Fri Apr 01 00:00:00 EST 2005},
month = {Fri Apr 01 00:00:00 EST 2005}
}
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