Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source

Journal Article · Fri Apr 01 04:00:00 EST 2005 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1884387· OSTI ID:20646463

Bergmann, Klaus; Rosier, Oliver; Metzmacher, Christof ^[1]

---

1. Fraunhofer Institute for Laser Technology, Steinbachstrasse 15, D-52074 Aachen (Germany)

A grazing incidence reflectometer operating in the extreme ultraviolet (EUV) spectral range around 13.5 nm is presented which is making use of a compact xenon pinch plasma light source. The apparatus allows for measuring the absolute reflectivity of a sample for grazing incidence angle in the range from typically 5 deg. to 35 deg. by comparing the EUV diode signal for the reflected light and a reference diode with an accuracy of better than 2%. Design criteria for proper matching of diode apertures and distances with respect to the spatially extended plasma source are presented. The absolute accuracy has been checked by investigating a ruthenium sample with low roughness, which has a reflectivity in the EUV close to the theoretical limit. Comparison to measurements at the EUV-reflectometer of the Physikalisch Technische Bundesanstalt in Berlin at a synchrotron source confirm the absolute accuracy of better than 2% for the reflectivity for the angle interval of interest.

• OSTI ID: 20646463
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 4 Vol. 76; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ACCURACY
APERTURES
EXTREME ULTRAVIOLET RADIATION
GRAZING
INCIDENCE ANGLE
LIGHT BULBS
LIGHT SOURCES
OPTICS
PLASMA
REFLECTIVITY
ROUGHNESS
RUTHENIUM
SYNCHROTRON RADIATION SOURCES
XENON