Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry

Journal Article · Wed Dec 01 00:00:00 EST 2004 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1821623· OSTI ID:20644044

Brooks, David J; Douthwaite, Richard E ^[1]

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1. Department of Chemistry, University of York, Heslington, York YO10 5DD (United Kingdom)

A microwave-induced plasma (MIP) reactor has been constructed from a domestic microwave oven (DMO) and applied to the bulk synthesis of solid state compounds. Low pressure MIP can be initiated and maintained using a range of gases including Ar, N{sub 2}, NH{sub 3}, O{sub 2}, Cl{sub 2}, and H{sub 2}S. In order to obtain reproducible synthesis conditions the apparatus is designed to allow control of gas flow rate, gas composition, and pressure. The use of the reactor is demonstrated by the synthesis of three binary metal nitrides formed in a NH{sub 3} MIP. The reactions are rapid and the products show good crystallinity and phase purity as judged by powder x-ray diffraction.

• OSTI ID: 20644044
• Journal Information: Review of Scientific Instruments, Vol. 75, Issue 12; Other Information: DOI: 10.1063/1.1821623; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
AMMONIA
CHLORINE
GAS FLOW
IMPURITIES
METALS
MICROWAVE OVENS
NITRIDES
PLASMA
PLASMA PRESSURE
RF SYSTEMS
SYNTHESIS
X-RAY DIFFRACTION