Efficient plasma source providing pronounced density peaks in the range of very low magnetic fields
- Department of Electronic Engineering, Tohoku University, Sendai 980-8579 (Japan)
Radio-frequency discharges are performed in low magnetic fields (0-10 mT) using three types of helicon-wave exciting antennas with the azimuthal mode number of m=1. The most pronounced peak of plasma density is generated in the case of a phased helical antenna at only a few mT, where the helicon wave with m=+1 is purely excited and propagates. An analysis based on the dispersion relation well explains the density-peak phenomenon in terms of the correspondence between the antenna one-wavelength and the helicon wavelength, bringing forth the optimization principle of plasma source design in very low magnetic fields00.
- OSTI ID:
- 20634382
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 18 Vol. 85; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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