Fabrication of high-resolution zone plates with wideband extreme-ultraviolet holography

Journal Article · Mon Oct 04 04:00:00 EDT 2004 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.1803937· OSTI ID:20634304

Solak, Harun H; David, Christian; Gobrecht, Jens ^[1]

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1. Laboratory for Micro and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen-PSI (Switzerland)

We report an achromatic holographic method to fabricate high-resolution x-ray optics using coherent extreme-ultraviolet radiation from an undulator source. The interference pattern between two spherical beams, which are created using Fresnel zone plates, is recorded to produce a higher-resolution zone plate. Analytical and simulation results showing the formation of the zone plate pattern was confirmed experimentally with the production and testing of a lens with 60-nm outermost zone width. The combination of extreme-ultraviolet light, which exposes photoresists with practically no proximity effect, and holography, which guarantees the accurate placement of zones, addresses the main difficulties faced in the improvement of the resolution of x-ray lenses. Holography with extreme-ultraviolet light has the potential to produce lenses with sub-10-nm resolution.

• OSTI ID: 20634304
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 14 Vol. 85; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
DIFFRACTION
EXTREME ULTRAVIOLET RADIATION
FABRICATION
FRESNEL LENS
HOLOGRAPHY
INTERFERENCE
PROXIMITY EFFECT
SIMULATION
SPATIAL RESOLUTION
X RADIATION