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Elasticity Imaging of Ferroelectric Domain Structure in PZT by Ultrasonic Atomic Force Microscopy

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.1711736· OSTI ID:20632895
 [1];  [1]; ;  [2]
  1. National Institute of Advanced Industrial Science and Technology, Tsukuba, 3058564 (Japan)
  2. Tohoku university, Sendai, 9808579 (Japan)
UAFM was applied to the observation of the domain structure in lead zirconate titanate (PZT). It imaged the change of elasticity due to grain and domain boundary (DB). For the quantitative evaluation of the contact stiffness, the lateral contact stiffness was taken into account. The stiffness of DB was 10% lower than that within the domain and the width of the DB was about 30 nm. The implication of this work is the understanding of the fatigue mechanism in a PZT memory and the high resolution imaging for a high-density memory.
OSTI ID:
20632895
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 700; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English

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