Fabrication of high performance microlenses for an integrated capillary channel electrochromatograph with fluorescence detection

Journal Article · Mon Nov 01 04:00:00 EST 1999 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.590991· OSTI ID:20217909

Wendt, J R ^[1]; Warren, M E ^[1]; Sweatt, W C ^[1]; Bailey, C G ^[1]; Matzke, C M ^[1]; Arnold, D W ^[1]; Allerman, A A ^[1]; Carter, T R ^[1]; Asbill, R E ^[1]; Samora, S ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185-0603 (United States)

We describe the microfabrication of an extremely compact optical system as a key element in an integrated capillary channel electrochromatograph with fluorescence detection. The optical system consists of a vertical cavity surface-emitting laser (VCSEL), two high performance microlenses, and a commercial photodetector. The microlenses are multilevel diffractive optics patterned by electron beam lithography and etched by reactive ion etching in fused silica. The design uses substrate-mode propagation within the fused silica substrate. Two generations of optical subsystems are described. The first generation design has a 6 mm optical length and is integrated directly onto the capillary channel-containing substrate. The second generation design separates the optical system onto its own substrate module and the optical path length is further compressed to 3.5 mm. The first generation design has been tested using direct fluorescence detection with a 750 nm VCSEL pumping a 10{sup -4} M solution of CY-7 dye. The observed signal-to-noise ratio of better than 100:1 demonstrates that the background signal from scattered pump light is low despite the compact size of the optical system and is adequate for system sensitivity requirements. (c) 1999 American Vacuum Society.

• OSTI ID: 20217909
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 6 Vol. 17; ISSN 0734-211X; ISSN JVTBD9
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
CHROMATOGRAPHY
ELECTRON BEAMS
ETCHING
EXPERIMENTAL DATA
FABRICATION
FLUORESCENCE
INTEGRATED CIRCUITS
MICROELECTRONICS
OPTICAL SYSTEMS