Real-time study of oxygen in c-axis oriented YBa{sub 2}Cu{sub 3}O{sub 7-{delta}} thin films using in situ spectroscopic ellipsometry
Journal Article
·
· Journal of Applied Physics
- Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27599 (United States)
- Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
- Ionwerks, Houston, Texas 77005 (United States)
The oxygen transport process in c-axis oriented YBa{sub 2}Cu{sub 3}O{sub 7-{delta}} thin films was investigated in real time during deposition and postdeposition oxidation using in situ spectroscopic ellipsometry (SE). Two transport regimes dominated by oxygen out- and in-diffusion have been observed during deposition by ion beam sputtering at 700 degree sign C. The effect of oxygen partial pressure on the extent of oxidation of as-deposited films has also been studied during the postdeposition cooling process. The thermodynamic stability of the grown films was examined by real time SE during the postannealing process. The relaxation time for oxygen diffusion has been found to decrease with higher oxygen partial pressures. The imaginary part of the pseudodielectric function <{epsilon}{sub 2}> at an absorption peak was quantitatively correlated to the oxygen concentration. The pseudodielectric functions of oxygen deficient YBa{sub 2}Cu{sub 3}O{sub 6} films in the temperature range from 27 to 700 degree sign C have been modeled using Lorentz oscillators. (c) 1999 American Institute of Physics.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL
- OSTI ID:
- 20217874
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 86; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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