Synthesis of diamondlike carbon films with superlow friction and wear properties

Journal Article · Sat Jul 01 04:00:00 EDT 2000 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.582459· OSTI ID:20217063

Erdemir, A ^[1]; Eryilmaz, O L ^[1]; Fenske, G ^[1]

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1. Energy Technology Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)

In this study, we introduce a new diamondlike carbon (DLC) film providing a friction coefficient of 0.001 and wear rates of 10{sup -9}-10{sup -10} mm{sup 3}/N m in inert-gas environments (e.g., dry nitrogen and argon). The film was grown on steel and sapphire substrates in a plasma enhanced chemical vapor deposition system that uses a hydrogen-rich plasma. Employing a combination of surface and structure analytical techniques, we explored the structural chemistry of the resultant DLC films and correlated these findings with the friction and wear mechanisms of the films. The results of tribological tests under a 10 N load (creating initial peak Hertz pressures of 1 and 2.2 GPa on steel and sapphire test pairs, respectively) and at 0.2 to 0.5 m/s sliding velocities indicated that a close correlation exists between the friction and wear coefficients of DLC films and the source gas chemistry. Specifically, films grown in source gases with higher hydrogen-to-carbon ratios had the lowest friction coefficients and the highest wear resistance. The lowest friction coefficient (0.001) was achieved with a film on sapphire substrates produced in a gas discharge plasma consisting of 25% methane and 75% hydrogen. (c) 2000 American Vacuum Society.

• OSTI ID: 20217063
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 4 Vol. 18; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
CHEMICAL VAPOR DEPOSITION
EXPERIMENTAL DATA
HYDROGEN
METHANE
PLASMA
SLIDING FRICTION
THIN FILMS
TRIBOLOGY
WEAR