Nanometer-scale electrochemical lithography on the spinel oxide LiMn{sub 2}O{sub 4}

Journal Article · Mon May 01 04:00:00 EDT 2000 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.126400· OSTI ID:20216176

Kostecki, Robert ^[1]; McLarnon, Frank ^[1]

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1. Lawrence Berkeley National Laboratory, Environmental Energy Technologies Division, 1 Cyclotron Rd., Berkeley, California 94720 (United States)

A scheme for nanometer-scale patterning of the surface of a conducting lithium manganese oxide (LiMn{sub 2}O{sub 4}) by scanning probe microscopy is described. A significant feature of this work is the demonstration that a localized surface chemical change can be confined to a depth which depends on the oxide-tip voltage bias and ambient humidity. Processing strategies exploiting this localized pattern generation vary from shallow surface property modification to localized etching of the oxide and the formation of nanometer-size pits, wells, or trenches. Unlike the scanning probe based surface oxidation of metals and semiconductors, the electroactive material is altered via electrochemically generated species. (c) 2000 American Institute of Physics.

• OSTI ID: 20216176
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 18 Vol. 76; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ELECTROCHEMISTRY
ELECTRON MICROSCOPY
ETCHING
EXPERIMENTAL DATA
LITHIUM OXIDES
MANGANESE OXIDES
SPINELS
SURFACES