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Microhollow cathode discharge excimer lamps

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.874039· OSTI ID:20216080
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  1. Physical Electronics Research Institute, Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, Virginia 23529 (United States)
Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 {mu}m range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer radiation was found to increase monotonically with pressure. However, due to the decrease in source size with pressure, the efficiency (ratio of excimer radiant power to input electrical power), has for xenon and argon fluoride a maximum at {approx}400 Torr. The maximum efficiency is between 6% and 9% for xenon, and {approx}2% for argon fluoride. (c) 2000 American Institute of Physics.
OSTI ID:
20216080
Journal Information:
Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 5 Vol. 7; ISSN PHPAEN; ISSN 1070-664X
Country of Publication:
United States
Language:
English