Ultra-high Q alumina optical microresonators in the UV and blue bands

He, Chengxing; Wang, Yubo; Waldfried, Carlo; Yang, Guangcanlan; Zheng, Jun-Fei; Hu, Shu; Tang, Hong X.

doi:10.1364/OE.492510

Ultra-high Q alumina optical microresonators in the UV and blue bands

Journal Article · Tue Sep 26 00:00:00 EDT 2023 · Optics Express

DOI:https://doi.org/10.1364/OE.492510· OSTI ID:2006515

; Wang, Yubo; Waldfried, Carlo; Yang, Guangcanlan; Zheng, Jun-Fei; Hu, Shu;

UV and visible photonics enable applications ranging from spectroscopic sensing to communication and quantum information processing. Photonics structures in these wavelength regimes, however, tend to experience higher loss than their IR counterpart. Particularly in the near-UV band, on-chip optical microresonators have not yet achieved a quality factor beyond 1 million. Here, we report ultra-low-loss photonic waveguides and resonators patterned from alumina thin films prepared by a highly scalable atomic layer deposition process. We demonstrate ultra high Q factor of 1.5×10 ⁶ at 390 nm, a record value at UV bands, and 1.9×10 ⁶ at 488.5 nm.

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Sponsoring Organization:: USDOE

OSTI ID:: 2006515

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 21 Vol. 31; ISSN 1094-4087; ISSN OPEXFF

Publisher:: Optical Society of AmericaCopyright Statement

Country of Publication:: United States

Language:: English

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