Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb3Sn film on Nb superconducting radiofrequency cavities

Shakel, Md Sharifuzzaman; Sayeed, Md Nizam; Eremeev, Grigory V.; Valente-Feliciano, Anne-Marie; Pudasaini, Uttar; Elsayed-Ali, Hani E.

doi:10.1016/j.vacuum.2023.112563

Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb₃Sn film on Nb superconducting radiofrequency cavities

Journal Article · Tue Aug 29 00:00:00 EDT 2023 · Vacuum

DOI:https://doi.org/10.1016/j.vacuum.2023.112563· OSTI ID:2004653

^[1]; Sayeed, Md Nizam ^[2]; Eremeev, Grigory V. ^[3]; Valente-Feliciano, Anne-Marie ^[4]; Pudasaini, Uttar ^[4]; ^[2]

Old Dominion University, Norfolk, VA (United States); Applied Research Center, Newport News, VA (United States); Old Dominion University
Old Dominion University, Norfolk, VA (United States); Applied Research Center, Newport News, VA (United States)
Fermi National Accelerator Laboratory (FNAL), Batavia, IL (United States)
Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)

A DC cylindrical magnetron sputter coater was commissioned and used to coat Nb 2.6 GHz superconducting radiofrequency (SRF) cavity with Nb₃Sn. The sputter coater has two identical cylindrical magnetrons that can move, with a controlled speed, along the axis of the SRF cavity to coat the inside surface of the cavity. The design of the sputter coater is discussed, along with its performance. Initially, a sample holder that allows coating on flat substrates at positions similar to the equator and beam tubes of a 2.6 GHz SRF cavity was used to test conditions for fabricating Nb₃Sn layers. Multilayers of Nb and Sn were sequentially sputtered on flat Nb and sapphire substrates mounted on the equivalent positions of the cavity's beam tubes and the equator using the two identical cylindrical magnetrons. Then, the Nb/Sn multilayers were annealed at 950 °C for 3 h. Here, the ~1.2 μm thick Nb₃Sn film did not show any other Nb–Sn compounds and had a superconducting transition temperature of 17.61–17.76 K. The 2.6 GHz SRF cavity was coated using similar conditions as flat samples. Cryogenic RF testing of the Nb₃Sn-coated cavity demonstrated a quality factor of 3.2 × 10⁸ at an accelerating gradient of 5 MV/m at 4.4 K.

View Accepted Manuscript (DOE)

Research Organization:: Old Dominion University, Norfolk, VA (United States)

Sponsoring Organization:: USDOE; USDOE Office of Science (SC), Accelerator R&D and Production (ARDAP); USDOE Office of Science (SC), High Energy Physics (HEP); USDOE Office of Science (SC), Nuclear Physics (NP)

Grant/Contract Number:: AC02-07CH11359; AC05-06OR23177; SC0022284

OSTI ID:: 2004653

Alternate ID(s):: OSTI ID: 1998827
OSTI ID: 1993404

Journal Information:: Vacuum, Journal Name: Vacuum Vol. 217; ISSN 0042-207X

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb3Sn film on Nb superconducting radiofrequency cavities

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