Aluminum Nitride Based MEMS: Sensors, Actuators, and Resonators.
Conference
·
OSTI ID:2002397
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- DARPA
- DOE Contract Number:
- NA0003525
- OSTI ID:
- 2002397
- Report Number(s):
- SAND2022-5000C; 705253
- Country of Publication:
- United States
- Language:
- English
Similar Records
Piezoelectric MEMS Based on Aluminum Nitride.
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Wed Dec 31 23:00:00 EST 2014
·
OSTI ID:1244916
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Tue May 01 00:00:00 EDT 2007
·
OSTI ID:1147804
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Fri Jun 01 00:00:00 EDT 2007
·
OSTI ID:1147912