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VO2 Thin Film Growth by RF Magnetron Sputtering on YSZ Substrate.

Conference ·
DOI:https://doi.org/10.2172/2002008· OSTI ID:2002008

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States); Sandia National Laboratories, Livermore, CA
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
2002008
Report Number(s):
SAND2022-2957C; 704126
Country of Publication:
United States
Language:
English

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