Electrically tunable metasurfaces incorporating a phase change material

Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan; Mauser, Kelly W.; Glaudell, Rebecca D.; Kafaie Shirmanesh, Ghazaleh; Atwater, Harry A.

Electrically tunable metasurfaces incorporating a phase change material

Patent · Tue May 30 04:00:00 EDT 2023

OSTI ID:1998419

Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan; Mauser, Kelly W.; Glaudell, Rebecca D.; Kafaie Shirmanesh, Ghazaleh; Atwater, Harry A.

Electrically tunable metasurfaces including an array of subwavelength metasurface unit elements are presented. The unit elements include a stacked metal-insulator-metal structure within which an active phase change layer is included. A purely insulator, metal, or coexisting metal-insulator phase of the active layer can be electrically controlled to tune an amplitude and phase response of the metasurfaces. In combination with the subwavelengths dimensions of the unit elements, the phase and amplitude response can be controlled in a range from optical wavelengths to millimeter wavelength of incident light. Electrical control of the unit elements can be provided via resistive heating produced by flow of current though a top metal layer of the unit elements. Alternatively, electrical control of the unit elements can be provided via electrical field effect produced by applying a voltage differential between the top and bottom metal layers of the unit elements.

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Research Organization:: California Inst. of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-07ER46405

Assignee:: California Institute of Technology (Pasadena, CA)

Patent Number(s):: 11,662,504

Application Number:: 16/740,322

OSTI ID:: 1998419

Country of Publication:: United States

Language:: English

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