Electrically tunable metasurfaces incorporating a phase change material

Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan; Mauser, Kelly W.; Glaudell, Rebecca D.; Kafaie Shirmanesh, Ghazaleh; Atwater, Harry A.

Electrically tunable metasurfaces incorporating a phase change material

Patent · Tue May 30 00:00:00 EDT 2023

OSTI ID:1998419

Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan; Mauser, Kelly W.; Glaudell, Rebecca D.; Kafaie Shirmanesh, Ghazaleh; Atwater, Harry A.

Electrically tunable metasurfaces including an array of subwavelength metasurface unit elements are presented. The unit elements include a stacked metal-insulator-metal structure within which an active phase change layer is included. A purely insulator, metal, or coexisting metal-insulator phase of the active layer can be electrically controlled to tune an amplitude and phase response of the metasurfaces. In combination with the subwavelengths dimensions of the unit elements, the phase and amplitude response can be controlled in a range from optical wavelengths to millimeter wavelength of incident light. Electrical control of the unit elements can be provided via resistive heating produced by flow of current though a top metal layer of the unit elements. Alternatively, electrical control of the unit elements can be provided via electrical field effect produced by applying a voltage differential between the top and bottom metal layers of the unit elements.

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Research Organization:: California Inst. of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-07ER46405

Assignee:: California Institute of Technology (Pasadena, CA)

Patent Number(s):: 11,662,504

Application Number:: 16/740,322

OSTI ID:: 1998419

Country of Publication:: United States

Language:: English

References (65)

Engineering the Phase Front of Light with Phase-Change Material Based Planar lenses Chen, Yiguo; Li, Xiong; Sonnefraud, Yannick Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep08660	journal	March 2015
Epsilon-Near-Zero Strong Coupling in Metamaterial-Semiconductor Hybrid Structures Jun, Young Chul; Reno, John; Ribaudo, Troy Nano Letters, Vol. 13, Issue 11 https://doi.org/10.1021/nl402939t	journal	October 2013
Influence of deposition process and substrate on the phase transition of vanadium dioxide thin films Marvel, Robert E.; Harl, Robert R.; Craciun, Valentin Acta Materialia, Vol. 91 https://doi.org/10.1016/j.actamat.2015.03.009	journal	June 2015
Optically reconfigurable metasurfaces and photonic devices based on phase change materials Wang, Qian; Rogers, Edward T. F.; Gholipour, Behrad Nature Photonics, Vol. 10, Issue 1 https://doi.org/10.1038/nphoton.2015.247	journal	December 2015
Self-Affine Graphene Metasurfaces for Tunable Broadband Absorption Wu, Pin Chieh; Papasimakis, Nikitas; Tsai, Din Ping Physical Review Applied, Vol. 6, Issue 4 https://doi.org/10.1103/PhysRevApplied.6.044019	journal	October 2016
Tunable Metasurface and Flat Optical Zoom Lens on a Stretchable Substrate Ee, Ho-Seok; Agarwal, Ritesh Nano Letters, Vol. 16, Issue 4 https://doi.org/10.1021/acs.nanolett.6b00618	journal	March 2016
Broad Electrical Tuning of Graphene-Loaded Plasmonic Antennas Yao, Yu; Kats, Mikhail A.; Genevet, Patrice Nano Letters, Vol. 13, Issue 3 https://doi.org/10.1021/nl3047943	journal	February 2013
Beam switching and bifocal zoom lensing using active plasmonic metasurfaces Yin, Xinghui; Steinle, Tobias; Huang, Lingling Light: Science & Applications, Vol. 6, Issue 7 https://doi.org/10.1038/lsa.2017.16	journal	June 2017
Electro-optical switching by liquid-crystal controlled metasurfaces Decker, Manuel; Kremers, Christian; Minovich, Alexander Optics Express, Vol. 21, Issue 7 https://doi.org/10.1364/OE.21.008879	journal	January 2013
An optoelectronic framework enabled by low-dimensional phase-change films Hosseini, Peiman; Wright, C. David; Bhaskaran, Harish Nature, Vol. 511, Issue 7508 https://doi.org/10.1038/nature13487	journal	July 2014
Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction Yu, N.; Genevet, P.; Kats, M. A. Science, Vol. 334, Issue 6054 https://doi.org/10.1126/science.1210713	journal	September 2011
Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial Liu, Mengkun; Hwang, Harold Y.; Tao, Hu Nature, Vol. 487, Issue 7407 https://doi.org/10.1038/nature11231	journal	July 2012
Mid-infrared properties of a VO 2 film near the metal-insulator transition Choi, H. S.; Ahn, J. S.; Jung, J. H. Physical Review B, Vol. 54, Issue 7 https://doi.org/10.1103/PhysRevB.54.4621	journal	August 1996
Nonvolatile Reconfigurable Phase-Change Metadevices for Beam Steering in the Near Infrared de Galarreta, Carlota Ruiz; Alexeev, Arseny M.; Au, Yat-Yin Advanced Functional Materials, Vol. 28, Issue 10 https://doi.org/10.1002/adfm.201704993	journal	January 2018
Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging Khorasaninejad, Mohammadreza; Chen, Wei Ting; Devlin, Robert C. Science, Vol. 352, Issue 6290 https://doi.org/10.1126/science.aaf6644	journal	June 2016
Aluminum Plasmonic Multicolor Meta-Hologram Huang, Yao-Wei; Chen, Wei Ting; Tsai, Wei-Yi Nano Letters, Vol. 15, Issue 5 https://doi.org/10.1021/acs.nanolett.5b00184	journal	April 2015
Gate-Tunable Conducting Oxide Metasurfaces Huang, Yao-Wei; Lee, Ho Wai Howard; Sokhoyan, Ruzan Nano Letters, Vol. 16, Issue 9 https://doi.org/10.1021/acs.nanolett.6b00555	journal	August 2016
Dynamic Beam Switching by Liquid Crystal Tunable Dielectric Metasurfaces Komar, Andrei; Paniagua-Domínguez, Ramón; Miroshnichenko, Andrey ACS Photonics, Vol. 5, Issue 5 https://doi.org/10.1021/acsphotonics.7b01343	journal	February 2018
Reconfigurable Photonic Platforms: A Lithography-Free and Field-Programmable Photonic Metacanvas (Adv. Mater. 5/2018) Dong, Kaichen; Hong, Sukjoon; Deng, Yang Advanced Materials, Vol. 30, Issue 5 https://doi.org/10.1002/adma.201870034	journal	February 2018
Dynamic Reflection Phase and Polarization Control in Metasurfaces Park, Junghyun; Kang, Ju-Hyung; Kim, Soo Jin Nano Letters, Vol. 17, Issue 1 https://doi.org/10.1021/acs.nanolett.6b04378	journal	December 2016
Plasmonic Nanostructured Metal–Oxide–Semiconductor Reflection Modulators Olivieri, Anthony; Chen, Chengkun; Hassan, Sa’ad Nano Letters, Vol. 15, Issue 4 https://doi.org/10.1021/nl504389f	journal	March 2015
Voltage tuning of plasmonic absorbers by indium tin oxide Yi, Fei; Shim, Euijae; Zhu, Alexander Y. Applied Physics Letters, Vol. 102, Issue 22 https://doi.org/10.1063/1.4809516	journal	June 2013
Two-dimensional current percolation in nanocrystalline vanadiumdioxide films Rozen, John; Lopez, René; Haglund, Richard F. Applied Physics Letters, Vol. 88, Issue 8 https://doi.org/10.1063/1.2175490	journal	February 2006
A magneto-electro-optical effect in a plasmonic nanowire material Valente, João; Ou, Jun-Yu; Plum, Eric Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms8021	journal	April 2015
Ultra-thin perfect absorber employing a tunable phase change material Kats, Mikhail A.; Sharma, Deepika; Lin, Jiao Applied Physics Letters, Vol. 101, Issue 22 https://doi.org/10.1063/1.4767646	journal	November 2012
Reversible Thermal Tuning of All-Dielectric Metasurfaces Rahmani, Mohsen; Xu, Lei; Miroshnichenko, Andrey E. Advanced Functional Materials, Vol. 27, Issue 31 https://doi.org/10.1002/adfm.201700580	journal	July 2017
Optically Monitored Electrical Switching in VO ₂ Markov, Petr; Marvel, Robert E.; Conley, Hiram J. ACS Photonics, Vol. 2, Issue 8 https://doi.org/10.1021/acsphotonics.5b00244	journal	July 2015
Versatile Polarization Generation with an Aluminum Plasmonic Metasurface Wu, Pin Chieh; Tsai, Wei-Yi; Chen, Wei Ting Nano Letters, Vol. 17, Issue 1 https://doi.org/10.1021/acs.nanolett.6b04446	journal	December 2016
Semiconductor to metal phase transition in the nucleation and growth of VO2 nanoparticles and thin films Suh, J. Y.; Lopez, R.; Feldman, L. C. Journal of Applied Physics, Vol. 96, Issue 2 https://doi.org/10.1063/1.1762995	journal	July 2004
Metal-insulator transitions Imada, Masatoshi; Fujimori, Atsushi; Tokura, Yoshinori Reviews of Modern Physics, Vol. 70, Issue 4, p. 1039-1263 https://doi.org/10.1103/RevModPhys.70.1039	journal	October 1998
High-Efficiency Broadband Anomalous Reflection by Gradient Meta-Surfaces Sun, Shulin; Yang, Kuang-Yu; Wang, Chih-Ming Nano Letters, Vol. 12, Issue 12 https://doi.org/10.1021/nl3032668	journal	February 2012
High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas Horie, Yu; Arbabi, Amir; Arbabi, Ehsan ACS Photonics, Vol. 5, Issue 5 https://doi.org/10.1021/acsphotonics.7b01073	journal	November 2017
Memory Metamaterials Driscoll, T.; Kim, H. -T.; Chae, B. -G. Science, Vol. 325, Issue 5947 https://doi.org/10.1126/science.1176580	journal	August 2009
Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission Arbabi, Amir; Horie, Yu; Bagheri, Mahmood Nature Nanotechnology, Vol. 10, Issue 11, p. 937-943 https://doi.org/10.1038/nnano.2015.186	journal	August 2015
Nanoscale Conducting Oxide PlasMOStor Lee, Ho W.; Papadakis, Georgia; Burgos, Stanley P. Nano Letters, Vol. 14, Issue 11, p. 6463-6468 https://doi.org/10.1021/nl502998z	journal	October 2014
Millivolt Modulation of Plasmonic Metasurface Optical Response via Ionic Conductance Thyagarajan, Krishnan; Sokhoyan, Ruzan; Zornberg, Leonardo Advanced Materials, Vol. 29, Issue 31 https://doi.org/10.1002/adma.201701044	journal	June 2017
Ultrawide Thermo-optic Tuning of PbTe Meta-Atoms Lewi, Tomer; Evans, Hayden A.; Butakov, Nikita A. Nano Letters, Vol. 17, Issue 6 https://doi.org/10.1021/acs.nanolett.7b01529	journal	May 2017
Multiple Avalanches across the Metal-Insulator Transition of Vanadium Oxide Nanoscaled Junctions Sharoni, Amos; Ramírez, Juan Gabriel; Schuller, Ivan K. Physical Review Letters, Vol. 101, Issue 2 https://doi.org/10.1103/PhysRevLett.101.026404	journal	July 2008
Dynamically Reconfigurable Metadevice Employing Nanostructured Phase-Change Materials Zhu, Zhihua; Evans, Philip G.; Haglund, Richard F. Nano Letters, Vol. 17, Issue 8 https://doi.org/10.1021/acs.nanolett.7b01767	journal	July 2017
Active Tuning of All-Dielectric Metasurfaces Sautter, Jürgen; Staude, Isabelle; Decker, Manuel ACS Nano, Vol. 9, Issue 4 https://doi.org/10.1021/acsnano.5b00723	journal	February 2015
Electronically Tunable Perfect Absorption in Graphene Kim, Seyoon; Jang, Min Seok; Brar, Victor W. Nano Letters, Vol. 18, Issue 2 https://doi.org/10.1021/acs.nanolett.7b04393	journal	January 2018
Dielectric gradient metasurface optical elements Lin, D.; Fan, P.; Hasman, E. Science, Vol. 345, Issue 6194, p. 298-302 https://doi.org/10.1126/science.1253213	journal	July 2014
Electrically Tunable Epsilon-Near-Zero (ENZ) Metafilm Absorbers Park, Junghyun; Kang, Ju-Hyung; Liu, Xiaoge Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep15754	journal	November 2015
Electronically-Controlled Beam-Steering through Vanadium Dioxide Metasurfaces Hashemi, Mohammed Reza M.; Yang, Shang-Hua; Wang, Tongyu Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep35439	journal	October 2016
Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide Driscoll, T.; Palit, S.; Qazilbash, M. M. Applied Physics Letters, Vol. 93, Issue 2 https://doi.org/10.1063/1.2956675	journal	July 2008
Thermal tuning of infrared resonant absorbers based on hybrid gold-VO ₂ nanostructures Kocer, Hasan; Butun, Serkan; Banar, Berker Applied Physics Letters, Vol. 106, Issue 16 https://doi.org/10.1063/1.4918938	journal	April 2015
High-Efficiency Broadband Meta-Hologram with Polarization-Controlled Dual Images Chen, Wei Ting; Yang, Kuang-Yu; Wang, Chih-Ming Nano Letters, Vol. 14, Issue 1 https://doi.org/10.1021/nl403811d	journal	December 2013
Electrical Switching of Infrared Light Using Graphene Integration with Plasmonic Fano Resonant Metasurfaces Dabidian, Nima; Kholmanov, Iskandar; Khanikaev, Alexander B. ACS Photonics, Vol. 2, Issue 2 https://doi.org/10.1021/ph5003279	journal	January 2015
Dual-Gated Active Metasurface at 1550 nm with Wide (>300°) Phase Tunability Kafaie Shirmanesh, Ghazaleh; Sokhoyan, Ruzan; Pala, Ragip A. Nano Letters, Vol. 18, Issue 5 https://doi.org/10.1021/acs.nanolett.8b00351	journal	March 2018
Hybrid metamaterials for electrically triggered multifunctional control Liu, Liu; Kang, Lei; Mayer, Theresa S. Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms13236	journal	October 2016
Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan Nano Letters, Vol. 19, Issue 6 https://doi.org/10.1021/acs.nanolett.9b01246	journal	April 2019
Metasurface holograms reaching 80% efficiency Zheng, Guoxing; Mühlenbernd, Holger; Kenney, Mitchell Nature Nanotechnology, Vol. 10, Issue 4, p. 308-312 https://doi.org/10.1038/nnano.2015.2	journal	February 2015
Frequency tunable near-infrared metamaterials based on VO₂ phase transition Dicken, Matthew J.; Aydin, Koray; Pryce, Imogen M. Optics Express, Vol. 17, Issue 20, p. 18330-18339 https://doi.org/10.1364/OE.17.018330	journal	January 2009
Planar Photonics with Metasurfaces Kildishev, A. V.; Boltasseva, A.; Shalaev, V. M. Science, Vol. 339, Issue 6125, p. 1232009-1232009 https://doi.org/10.1126/science.1232009	journal	March 2013
Gap plasmon-based metasurfaces for total control of reflected light Pors, Anders; Albrektsen, Ole; Radko, Ilya P. Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep02155	journal	July 2013
Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift She, Alan; Zhang, Shuyan; Shian, Samuel Science Advances, Vol. 4, Issue 2 https://doi.org/10.1126/sciadv.aap9957	journal	February 2018
Tunable large resonant absorption in a midinfrared graphene Salisbury screen Jang, Min Seok; Brar, Victor W.; Sherrott, Michelle C. Physical Review B, Vol. 90, Issue 16 https://doi.org/10.1103/PhysRevB.90.165409	journal	October 2014
Optimal Polarization Conversion in Coupled Dimer Plasmonic Nanoantennas for Metasurfaces Black, Leo-Jay; Wang, Yudong; de Groot, C. H. ACS Nano, Vol. 8, Issue 6 https://doi.org/10.1021/nn501889s	journal	May 2014
Active Tuning of Spontaneous Emission by Mie-Resonant Dielectric Metasurfaces Bohn, Justus; Bucher, Tobias; Chong, Katie E. Nano Letters, Vol. 18, Issue 6 https://doi.org/10.1021/acs.nanolett.8b00475	journal	April 2018
Mott Transition in VO2 Revealed by Infrared Spectroscopy and Nano-Imaging Qazilbash, M. M.; Brehm, M.; Chae, B. -G. Science, Vol. 318, Issue 5857 https://doi.org/10.1126/science.1150124	journal	December 2007
Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene–Gold Reconfigurable Mid-Infrared Metasurfaces Sherrott, Michelle C.; Hon, Philip W. C.; Fountaine, Katherine T. Nano Letters, Vol. 17, Issue 5 https://doi.org/10.1021/acs.nanolett.7b00359	journal	April 2017
Deterministic and robust room-temperature exchange coupling in monodomain multiferroic BiFeO3 heterostructures Saenrang, W.; Davidson, B. A.; Maccherozzi, F. Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/s41467-017-01581-6	journal	November 2017
An electromechanically reconfigurable plasmonic metamaterial operating in the near-infrared Ou, Jun-Yu; Plum, Eric; Zhang, Jianfa Nature Nanotechnology, Vol. 8, Issue 4, p. 252-255 https://doi.org/10.1038/nnano.2013.25	journal	March 2013
A Switchable Mid-Infrared Plasmonic Perfect Absorber with Multispectral Thermal Imaging Capability Tittl, Andreas; Michel, Ann-Katrin U.; Schäferling, Martin Advanced Materials, Vol. 27, Issue 31 https://doi.org/10.1002/adma.201502023	journal	July 2015
MEMS-tunable dielectric metasurface lens Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03155-6	journal	February 2018

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